TecHarmonic - CMS - Central Monitoring System

CMS Central Monitoring System

Features

Single unified server platform & Ethernet LAN
MS Windows Internet Explorer GUI
Optional Internet and modem capable

Benefits

Monitor/control of fab abatement tools
Remote data collection and data logging
Remote fault and excursion detection
Remote programming and troubleshooting
Remote power on/off & idle mode control
Operation, maintenance & cost management of large fab installations

Please contact TecHarmonic for support services.

Use TecHarmonic products for full-fab abatement. Pioneering technology grounded on solid chemical engineering principles, and offering a variety of abatement technologies including wet, dry, thermal and combination, TecHarmonic provides abatement solutions customized for your specific application.

If you need an abatement system and or abatement technology recommendation from TecHarmonic, please fill out and fax the Abatement Requirements Form to us.

Go to TecHarmonic Product - Technology Summary Table
Go to TecHarmonic Product - Gas Application Summary Table